7 results
Fabrication of Micro- and Nanoscale SiC Structures Using Selective Deposition Processes
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 782 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, A2.2
- Print publication:
- 2003
-
- Article
- Export citation
Low Temperature (300°C) Formation of Thermodynamically Stable NiSi2 Contacts to SiC
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 640 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, H5.22
- Print publication:
- 2000
-
- Article
- Export citation
Pendeo-epitaxial Growth and Characterization of GaN and related Materials on 6H-SiC(0001) and Si(111) Substrates
-
- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 5 / Issue S1 / 2000
- Published online by Cambridge University Press:
- 13 June 2014, pp. 49-61
- Print publication:
- 2000
-
- Article
-
- You have access
- HTML
- Export citation
Deposition and Characterization of In-Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 605 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 31
- Print publication:
- 1999
-
- Article
- Export citation
Pendeo-Epitaxial Growth of GaN on SiC and Silicon Substrates via Metalorganic Chemical Vapor Deposition
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 572 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 307
- Print publication:
- 1999
-
- Article
- Export citation
Pendeo-Epitaxial Growth and Characterization of GaN and Related Materials on 6H-SiC(0001) and Si(111) Substrates
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 595 / 1999
- Published online by Cambridge University Press:
- 03 September 2012, F99W2.1
- Print publication:
- 1999
-
- Article
- Export citation
Xrd and Xtem Investigation of Polycrystalline Silicon Carbide on Polycrystalline Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 444 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 81
- Print publication:
- 1996
-
- Article
- Export citation